Failure Analysis Laboratory

The Innoscience Failure Analysis Laboratory is equipped with industry-leading equipment for electrical and physical failure analysis. It provides robust support for the company's R&D debugging, process monitoring, and yield and reliability enhancement, while also delivering efficient and comprehensive failure analysis services to all Innoscience customers.

Failure Analysis Workflow

INNO FA Equipment and Capabilities Overview
Major equipment includes:
  • Non-Destructive X-Ray Inspector
  • Laser Decapsulation System
  • Static Parametric Analyzer
  • Optical Microscope (OM)
  • Sample Preparation (Supporting)
  • Scanning Electron Microscope (SEM)
  • Focused Ion Beam (FIB) System
  • Transmission Electron Microscope (TEM)
  • Secondary Ion Mass Spectrometer (SIMS)
  • Emission Microscope (EMMI) / Optical Beam Induced Resistance Change (OBIRCH)
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