Silicon technology has been scaling in terms of wafer size over the past 40 years going from small inches up to 8-inch and today 12-inches. The aim was always the same: simultaneously process more devices per wafer and thus lower their cost.

Similarly, while other GaN players are still today on 4-inch or 6-inch wafer size, Innoscience from the very beginning is strategically adopting 8-inch wafer size. By processing an 8-inch GaN-on-Si wafer, Innoscience obtains 80% more devices per wafer with respect to what would be possible with a 6-inch wafer. Obviously, this has a direct impact on the device cost allowing Innoscience to make GaN device technology affordable.

Silicon technology has been in mass production for past 40 years. Silicon device manufactures supported by the tool makers, have optimized their process in terms of throughput (wafer-per-hour) and quality in order to utilize every inch of their Silicon wafer and produce as many wafers as possible with their line.

For this reason, Innoscience has decided to equip its lines with brand new 8-inch high-throughput Silicon manufacturing tools (e.g. ASML scanners) and to develop a Silicon compatible process flow (e.g. gold free metals, planarize process, topography defines by etching process rather than lift-off etc…).

Therefore,  Innoscience has leveraged years of learning and optimization for the mass production of Silicon technology for the production of cost-effective 8-inch GaN-on-Si transistors.

Obtaining a large number of device per wafer is not enough if the process yield is not optimized.

Being Innoscience an IDM and thus controlling the full manufacturing flow (from epitaxy until the transistor completion), Innoscience could improve every technology aspect in order to obtain both high wafer and device yield.

Innoscience has optimized the epitaxy processing in order to obtain uniform, reproducible and robust 8-inch GaN-on-Si epi-wafers, which are the basis for the device processing. Next to this, Innoscience has optimized the process technology, enlarge process windows etc.. in order to obtain a reproducible process and a large number of good device per wafer.

Today, Innoscience has been producing more than 10,000 wafers/month with excellent reproducibility and high wafer and device yield.